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Onto Innovation Inc. (ONTO)
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Onto Innovation Inc. (ONTO) SEC Filings

Filing links are provided when reliable SEC filing data is available.

Recent Filings

FormFiling DateAcceptedDocument
SDMay 27, 2026May 27, 2026View filing
4May 22, 2026May 22, 2026View filing
4May 22, 2026May 22, 2026View filing
4May 22, 2026May 22, 2026View filing
4May 22, 2026May 22, 2026View filing
4May 22, 2026May 22, 2026View filing
4May 22, 2026May 22, 2026View filing
8-KMay 21, 2026May 21, 2026View filing
8-KMay 20, 2026May 20, 2026View filing
4May 18, 2026May 18, 2026View filing
4May 18, 2026May 18, 2026View filing
8-KMay 18, 2026May 18, 2026View filing
10-QMay 5, 2026May 5, 2026View filing
8-KMay 5, 2026May 5, 2026View filing
SC 13GApr 29, 2026Apr 29, 2026View filing
SC 13GApr 29, 2026Apr 29, 2026View filing
8-KApr 21, 2026Apr 20, 2026View filing
8-KApr 16, 2026Apr 16, 2026View filing
ARSApr 6, 2026Apr 6, 2026View filing
DEFA14AApr 6, 2026Apr 6, 2026View filing
DEF 14AApr 6, 2026Apr 6, 2026View filing
SC 13G/AMar 27, 2026Mar 27, 2026View filing
4Mar 4, 2026Mar 4, 2026View filing
4Mar 4, 2026Mar 4, 2026View filing
4Mar 4, 2026Mar 4, 2026View filing
4Mar 4, 2026Mar 4, 2026View filing
4Mar 4, 2026Mar 4, 2026View filing
4Mar 4, 2026Mar 4, 2026View filing
4Mar 3, 2026Mar 3, 2026View filing
4Mar 3, 2026Mar 3, 2026View filing

About Onto Innovation Inc.

Onto Innovation Inc. is a global leader in designing, manufacturing, and supporting cutting-edge process control solutions. The company's diverse portfolio encompasses tools for macro defect inspection, 2D/3D optical metrology, and lithography systems, alongside sophisticated analytical software for process control. These offerings are crucial for optimizing manufacturing processes, enhancing yield, and facilitating device packaging and testing in various industries worldwide. Their solutions are delivered both as standalone systems for specialized functions—such as detecting large flaws, performing packaging lithography, evaluating probe cards, and measuring transparent and opaque thin films—and through an extensive suite of process control software. This software scales from individual tool management to enterprise-wide factory integration. Beyond hardware and software, Onto Innovation also provides essential spare parts and software licensing services. Their technology is vital to a broad spectrum of clients, including manufacturers of semiconductors, advanced packaging, silicon wafers, LEDs, VCSELs, MEMS, CMOS image sensors, power devices, RF filters, and data storage products, as well as those in various industrial and scientific fields. Originally established in 1940 as Rudolph Technologies, Inc., Onto Innovation Inc. maintains its headquarters in Wilmington, Massachusetts.

Wilmington, MA
1,551 employees
Technology / Semiconductors
Sector
Technology
Industry
Semiconductors
CEO
Michael Plisinski