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Onto Innovation Inc. (ONTO)
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Onto Innovation Inc. (ONTO) Research & Development Expenses

The r&d expense for Onto Innovation Inc. (ONTO) is $131.98 Million with a year-over-year change of +13.03%. Research and Development (R&D) expenses represent the costs incurred by a company in developing new products, services, or processes.

ONTO R&D Expense Chart

ONTO R&D Expense
$131.98M+252.32% 20Y
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Current R&D Expense

$131.98M

$131.98 Million

Year-over-Year Change

+13.03%

vs. $116.77M prior year

Historical Data

30

Years of data available

Annual R&D Expense History

YearR&D ExpenseYoY Change% Change
2026$131.98M+$15.21M+13.03%
2024$116.77M+$12.32M+11.80%
2023$104.44M$-7.51M-6.71%
2022$111.95M+$15.84M+16.47%
2022$96.12M+$11.53M+13.64%
2020$84.58M+$36.23M+74.91%
2019$48.36M$-695,000-1.42%
2018$49.05M+$2.07M+4.40%
2017$46.99M+$2.02M+4.50%
2016$44.96M+$3.73M+9.05%
2015$41.23M+$657,000+1.62%
2014$40.58M+$582,000+1.46%
2013$39.99M+$663,000+1.69%
2012$39.33M+$3.03M+8.36%
2011$36.30M+$2.91M+8.72%
2010$33.39M+$7.40M+28.46%
2009$25.99M$-5.65M-17.86%
2008$31.64M+$1.65M+5.50%
2007$29.99M$-7.47M-19.93%
2006$37.46M+$25.56M+214.76%
2005$11.90M$-3.95M-24.90%
2004$15.85M+$2.46M+18.35%
2003$13.39M+$1.56M+13.21%
2002$11.83M+$203,000+1.75%
2001$11.63M+$2.60M+28.85%
2000$9.02M+$4.02M+80.44%
1999$5.00M$-100,000-1.96%
1998$5.10M+$2.10M+70.00%
1997$3.00M+$200,000+7.14%
1996$2.80M
Data as of Saturday, June 20, 2026

About Onto Innovation Inc.

Onto Innovation Inc. is a global leader in designing, manufacturing, and supporting cutting-edge process control solutions. The company's diverse portfolio encompasses tools for macro defect inspection, 2D/3D optical metrology, and lithography systems, alongside sophisticated analytical software for process control. These offerings are crucial for optimizing manufacturing processes, enhancing yield, and facilitating device packaging and testing in various industries worldwide. Their solutions are delivered both as standalone systems for specialized functions—such as detecting large flaws, performing packaging lithography, evaluating probe cards, and measuring transparent and opaque thin films—and through an extensive suite of process control software. This software scales from individual tool management to enterprise-wide factory integration. Beyond hardware and software, Onto Innovation also provides essential spare parts and software licensing services. Their technology is vital to a broad spectrum of clients, including manufacturers of semiconductors, advanced packaging, silicon wafers, LEDs, VCSELs, MEMS, CMOS image sensors, power devices, RF filters, and data storage products, as well as those in various industrial and scientific fields. Originally established in 1940 as Rudolph Technologies, Inc., Onto Innovation Inc. maintains its headquarters in Wilmington, Massachusetts.

Wilmington, MA
1,551 employees
Technology / Semiconductors
Sector
Technology
Industry
Semiconductors
CEO
Michael Plisinski